Method of programming a non-volatile memory cell using a vertical electric field

ABSTRACT

A method of programming a memory cell with a substrate that includes a first region and a second region with a channel therebetween and a gate above the channel, and a charge trapping region that contains a first amount of charge. The method includes applying a lateral electric field within the channel that generates a depletion layer that has electrons at a bottom portion of the depletion layer and applying a vertical electric field within the channel that has a sufficient strength so that the electrons at the bottom portion of the depletion layer are injected into the charge trapping region.

Applicants claim, under 35 U.S.C. §119(e), the benefit of priority ofthe filing date of Aug. 25, 2000, of U.S. Provisional Patent ApplicationSer. No. 60/227,836, filed on the aforementioned date, the entirecontents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to the field of non-volatile memorydevices. More particularly, the invention relates to a method ofprogramming multi-bit flash electrically erasable programmable read onlymemory (EEPROM) cells that utilize the phenomena of hot electroninjection to trap charge within a trapping dielectric material withinthe gate.

2. Discussion of Related Art

Memory devices for non-volatile storage of information are currently inwidespread use today, being used in a myriad of applications. A fewexamples of non-volatile semiconductor memory include read only memory(ROM), programmable read only memory (PROM), erasable programmable readonly memory (EPROM), electrically erasable programmable read only memory(EEPROM) and flash EEPROM.

Semiconductor EEPROM devices involve more complex processing and testingprocedures than ROM, but have the advantage of electrical programmingand erasing. Using EEPROM devices in circuitry permits in-circuiterasing and reprogramming of the device, a feat not possible withconventional EPROM memory. Flash EEPROMs are similar to EEPROMs in thatmemory cells can l e programmed (i.e., written) and erased electricallybut with the additional ability of erasing all memory cells at once,hence the term flash EEPROM.

An example of a single transistor Oxide-Nitrogen-Oxide (ONO) EEPROMdevice is disclosed in the technical article entitled “A TrueSingle-Transistor Oxide-Nitride-Oxide EEPROM Device,” T. Y. Chan, K. K.Young and Chenming Hu, IEEE Electron Device Letters, March 1987. Thememory cell is programed by hot electron injection and the injectedcharges are stored in the oxide-nitride-oxide (ONO) layer of the device.This article teaches programming and reading in the forward direction.Thus, a wider charge trapping region is required to achieve asufficiently large difference in threshold voltages between programmedand erase id states, and only one physical location per cell is used tostore the electrons.

An attempt to improve the programming of such ONO EEPROM devices byusing two distinct locations per cell to store the electrons isdisclosed in both U.S. Pat. No. 5,768,192 and PCT patent applicationpublication WO 99/07000, the contents of which are hereby incorporatedherein by reference. In those disclosed devices, a cell is programmedusing hot electron programming, each bit is read in a direction oppositethat in which it was programmed with a relatively low gate voltage. Forexample, the right bit is programmed conventionally by applyingprogramming or voltages to the gate and the drain while the source isgrounded. Hot electrons are accelerated sufficiently to be injected intoa region of the trapping dielectric layer near the drain. The device,however, is read in the opposite direction from which it was written,meaning voltages are applied to the gate and the source while the drainis grounded. The left bit is similarly programmed and read by swappingthe functionality of source and drain terminals. Programming one thebits leaves the other bit with its information intact and undisturbed.Programming one of the bits, however, have a very small effect on theother bit, e.g., slightly slower programming speed for the second bit.However, the efficiency of such programming is often inadequate sincemost of the hot electrons are placed too near the drain. In addition,injection of the electrons into the gate is done by giving the electronsenough energy to surmount the oxide barrier. However, the energy issupplied solely from a lateral electric field that produces energeticelectrons in the drain.

SUMMARY OF THE INVENTION

One aspect of the present invention regards a method of programming amemory cell with a substrate that includes a first region and a secondregion with a channel therebetween and a gate above the channel, and acharge trapping region that contains a first amount of charge. Themethod further includes applying a lateral electric field within thechannel that generates a depletion layer that has electrons at a bottomportion of the depletion layer and applying a vertical electric fieldwithin the channel that has a sufficient strength so that the electronsat the bottom portion of the depletion layer are injected into thecharge trapping region.

The above aspect of the present invention provides the advantage ofimproving the efficiency of programming by more efficiently impartingthe energy necessary for injecting electrons in the gate oxide.

The above aspect of the present invention provide the advantage of moreeffectively controlling the injection location to make erasing morecomplete.

The above aspect of the present invention provides the advantage ofimproving the endurance (cycling) of a memory cell.

The present invention, together with attendant objects and advantages,will be best understood with reference to the detailed description belowin connection with the attached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a sectional view of a single bit flash EEPROM cell ofthe prior art utilizing Oxide-Nitride-Oxide (ONO) as the gatedielectric;

FIG. 2 illustrates a sectional view of a two bit flash EEPROM cellconstructed in accordance with an embodiment of the present inventionutilizing ONO as the gate dielectric;

FIG. 3 illustrates a sectional view of a two bit flash EEPROM cellconstructed in accordance with an embodiment of the present inventionutilizing a silicon rich silicon dioxide with buried polysilicon islandsas the gate dielectric;

FIG. 4A illustrates a sectional view of a flash EEPROM cell of the priorart showing the area of charge trapping under the gate;

FIG. 4B illustrates a sectional view of a flash EEPROM cell constructedin accordance with an embodiment of the present invention showing thearea of charge trapping under the gate;

FIG. 5 is a sectional view of an embodiment of a two bit EEPROM cellshowing the area of charge trapping under the gate for both the rightand the left bits; and

FIG. 6 is a sectional view of an embodiment of a two bit EEPROM cellthat employs a first mode of programming according to the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION

The structure of a two bit flash EEPROM cell that employs the method oferasure of the present invention can best be understood with anunder,standing of how single bit charge trapping dielectric flash EEPROMmemory cells are constructed, programmed and read. For example, aconventional ONO EEPROM memory cell is shown in FIG. 1 and is disclosedin the technical article entitled “A True Single-TransistorOxide-Nitride-Oxide EEPROM Device,” TX. Chan, K. K. Young and ChenmingHu, IEEE Electron Device Letters, March 1987, incorporated herein byreference. The memory cell 41 comprises a P-type silicon substrate 30,two PN junctions between N+ source and drain regions 32, 34 and P typesubstrate 30, a non-conducting nitride layer 38 sandwiched between thetwo oxide layers 36, 40 and a polycrystalline conducting layer 42.

To program or write the memory cell 41, voltages can be applied to thedrain 34 and the gate 42 and the source 32 is grounded in one knownmanner. For example, 10V is applied to the gate and 9V is applied to thedrain. These voltages generate a vertical and lateral electric fieldalong the length of the channel from the source to the drain. Thiselectric field causes electrons to be drawn off the source and beginaccelerating toward the drain. As they move along the length of thechannel, they gain energy. If they gain enough energy, they are able tojump over the potential barrier of the oxide layer 36 into the siliconnitride layer 38 and become trapped. The probability of this occurringis a maximum in the region of the gate next to the drain 34 because itis near the drain that the electrons gain the most energy. Theseaccelerated electrons are termed hot electrons and once injected intothe nitride layer 38 they become trapped and remain stored there. Thetrapped electrons cannot spread through the nitride layer 38 because ofthe low conductivity of the nitride layer 38 and the low lateralelectric field in the nitride layer. Thus, the trapped charge remains ina localized trapping region in the nitride layer 38 typically locatedclose to the drain 34.

In order to achieve an effective delta in threshold voltage between theunprogrammed and the programmed state of each cell, the charge trappingregion of prior art flash EEPROM cells must be made fairly wide. Thus,electrons are trapped in areas far from the drain that directly affectsthe effectiveness of the erase. In some cases, the device cannot beerased at all because the charge trapping region was programmed toowide.

In memory cells constructed using a conductive floating gate, the chargethat gets injected into the gate is distributed equally across theentire gate. The threshold voltage of the entire gate increases as moreand more charge is injected into the gate. The threshold voltageincreases because the electrons that become stored in the gate screenthe gate voltage from the channel.

In devices with low conductivity or non conductive floating gates likethe embodiment shown in FIG. 1, the injection of hot electrons into thesilicon nitride layer causes the gate threshold voltage to increase onlyin the localized trapping region. This is in contrast to the conductivefloating gate memory cells of EPROMs and EEPROMs wherein the gatethreshold voltage of the entire channel rises as programming timeincreases. In both conductive and non conductive floating gate memorycell designs, an increase in the gate threshold voltage causes thecurrent flowing through the channel to decrease for a given gatevoltage. This reduces programming efficiency by lengthening theprogramming time. However, due to the localized electron trapping in thenon conductive floating gate memory cell design, the programming time isreduced less than with the conductive floating gate memory cell design.The technique of programming flash EEPROM memory cells with eitherconductive or low conductivity or non conductive floating gates is wellknown in the art and is currently used to program EEPROM and flashEEPROM memory cells.

The conventional technique of reading both prior art conductive floatinggate and non conductive localized trapping gate EEPROM or flash EEPROMmemory cells is to apply read voltages to the gate and drain and toground the source. This is similar to the method of programmingdescribed previously with the difference being that lower level voltagesare applied during reading than during programming. Since the floatinggate is conductive, the trapped charge is distributed evenly throughoutthe entire floating conductor. In a programmed device, the threshold istherefore high for the entire channel and the process of reading becomessymmetrical. It makes no difference whether voltage is applied to thedrain and the source is grounded or vice versa. A similar process isalso used to read prior art non conductive localized gate flash EEPROMdevices.

The process of programming EPROM and EEPROM memory devices typicallyincludes writing followed by reading. For instance, a short programmingpulse is applied to the device followed by a read. The read is actuallyused to effectively measure the gate threshold voltage. By convention,the gate threshold voltage is measured by applying a voltage to thedrain and a separate voltage to the gate, with the voltage on the gatebeing increased from zero while the channel current flowing from drainto source is measured. The gate voltage that provides 1 pA of channelcurrent is termed the threshold voltage.

Typically, programming pulses (i.e., write pulses) are followed by readcycles wherein the read is performed in the same direction that theprogramming pulse is applied. This is termed symmetrical programming andreading. Programming stops when the gate threshold voltage has reached acertain predetermined point (i.e., the channel current is reduced to asufficiently low level). This point is chosen to ensure that a ‘0’ bitcan be distinguished from a ‘1’ bit and that a certain data retentiontime has been achieved.

An embodiment of a two bit flash EEPROM cell that can utilize a methodof programming in accordance with an embodiment of the present inventionis shown in FIG. 2. The flash EEPROM memory cell 10 includes a P-typesubstrate 12 having two buried PN junctions, one being between thesource 14 and substrate 12, termed the left junction and the other beingbetween the drain 16 and the substrate 12, termed the right junction.Above the channel is a layer of silicon dioxide 18 that has a thicknessthat ranges between approximately 60 to 100 Angstroms, and which formsan electrical isolation layer over the channel. On top of the silicondioxide layer 18 is a charge trapping layer 20 that has a thicknessranging from 20 to 100 Angstroms thick and preferably is comprised ofsilicon nitride, Si₃N₄. The charge trapping layer can be constructedusing silicon nitride, silicon dioxide with buried polysilicon islandsor implanted oxide, for example or it can be made of an oxide implantedwith arsenic, for example. The hot electrons are trapped as they areinjected into the charge trapping layer so that the charge trappinglayer serves as the memory retention layer. The thickness of layer 18 ischosen to be in excess of 50 angstrom to prevent electrons fromtunneling through the oxide and leaving charge trapping layer 20 duringthe operation of the cell. Thus the lifetime of the cell of thisinvention is greatly extended relative to prior art MNOS devices. Thememory cell 10 is capable of storing two bits of data, a right bitrepresented by the dashed circle 23 and a left bit represented by thedashed circle 21.

It is important to note that the two bit memory cell is a symmetricaldevice. For example, the left junction serves as the source terminal andthe right junction serves as the drain terminal for the right bit.Similarly, for the left bit, the right junction serves as the sourceterminal and the left junction serves as the drain terminal. Thus, theterms left, or first junction and right or second junction are usedherein rather than source and drain. When the distinction between leftand right bits is not crucial to the particular discussion, the termssource and drain are utilized. However, it should be understood that thesource and drain terminals for the second bit are reversed compared tothe source and drain terminals for the first bit.

Another layer of silicon dioxide 22 is formed over the charge trappinglayer, (i.e., silicon nitride layer), and has a thickness that rangesbetween approximately 60 to 100 Angstroms thick. The silicon dioxidelayer 22 functions to electrically isolate a conductive gate 24 formedover the silicon dioxide layer 22 from charge trapping layer 20. Thethickness of gate 24 is approximately 4,000 Angstroms. Gate 24 can beconstructed from polycrystalline silicon, commonly known as polysilicon.

Charge trapping dielectric materials other than nitride may also besuitable for use as the asymmetric charge trapping medium. One suchmaterial is silicon dioxide with buried polysilicon islands. The silicondioxide with polysilicon islands is sandwiched between two layers ofoxide in similar fashion to the construction of the ONO memory cell inFIG. 2. A sectional view of such a two bit flash EEPROM cell is shown inFIG. 3 where there is a silicon rich silicon dioxide layer 54 withburied polysilicon islands 57 as the gate dielectric is illustrated inFIG. 3. A P-type substrate 62 has buried N+ source 58 and N+ drain 60regions. The silicon dioxide 54 with buried polysilicon islands 57 issandwiched between two layers of silicon dioxide 52, 56. Covering oxidelayer 52 is polysilicon gate 50. Gate 50 is typically heavily doped withan N-type impurity such as phosphorus in the 10¹⁹ to 10²⁰ atom/cc range.Similar to the two bit memory cell of FIG. 2, the memory cell of FIG. 3is capable of storing two data bits, a right bit represented by thedashed circle 55 and a left bit represented by the dashed circle 53. Theoperation of the memory cell of FIG. 3 is similar to that of the memorycell illustrated in FIG. 2 with programming and reading occurring inopposite directions for each bit.

Alternatively, the charge trapping dielectric can be constructed byimplanting an impurity, such as arsenic, into a middle layer 54 ofsilicon dioxide deposited on top of the bottom oxide 56.

Rather than performing symmetrical programming and reading, the flashEEPROM memory cell of FIG. 2 is programmed and read asymmetricallyrather than symmetrically as with the cell of FIG. 1. This means thatprogramming and reading occur in opposite directions as denoted by theoppositely pointing arrows labeled PROGRAM and READ for each bit (i.e.the left bit and the right bit) in FIG. 2. Thus, programming isperformed in what is termed the forward direction and reading isperformed in what is termed the opposite or reverse direction.

It is noted that throughout the discussion of the EEPROM memory cell ofthe present invention presented below, the voltage levels discussed incorrection therewith are assumed to be independent of the power supplyvoltage. Thus, the power supply voltages supplied to the chip embodyingthe EEPROM memory device may vary while the voltages applied to thegate, drain and source thereof will be supplied from regulated voltagesources.

As previously mentioned, the flash EEPROM memory cell 10 of FIG. 2 maybe programmed similarly to the prior art flash EEPROM memory cell ofFIG. 1. In this known mode of programming, voltages are applied to thegate 24 and drain 16 creating vertical and lateral electrical fieldsthat accelerate electrons from the source 14 along the length of thechannel. As the electrons move along the channel some of them gainsufficient energy to jump over the potential barrier of the bottomsilicon dioxide layer 18 and become trapped in the silicon nitride layer20. For the right bit, for example, the electron trapping occurs in aregion near the drain 115 indicated by the dashed circle 23 in FIG. 2.Thus, the trapped charge is self-aligned. to the junction between thedrain 16 and the substrate. Electrons are trapped in the portion ofnitride layer 20 near but above and self-aligned with the drain region16 because the electric fields are the strongest there. Thus, theelectrons have a maximum probability of being sufficiently energized tojump the potential barrier of the silicon dioxide layer 18 and becometrapped in the nitride layer 20 near the drain 16. The threshold voltageof the portion of the channel between the source 14 and drain 16 underthe region of trapped charge increases as more electrons are injectedinto the nitride layer 20.

It is important to note that in order to be able to subsequently erasememory device 10 effectively, the programming time period must belimited. As the device continues to be programmed, the width of thecharge trapping region increases. If programming continues past acertain point the charge trapping region becomes too wide wherebyerasing is ineffective in removing trapped charge from the nitride layer20.

However, by reading in the reverse direction an amplification of theeffect of the trapped charge injected into the nitride layer results andwhich leads to dramatically shortened programming times. Reading in thereverse direction permits a much narrower charge trapping region. Thisin turn greatly increases the erase efficiency since fewer electronsneed to be removed to erase the device. In addition, the trappedelectrons are stored in a narrower region near the drain also improvingthe effectiveness of the erase.

A description of what occurs during a known mode of programming ispresented first so as to understand the mode of programming according tothe present invention. Note that the description that follows alsopertains to the memory cell of FIG. 3 comprising the silicon dioxidelayer 54 having buried polysilicon islands 57 substituting for thenitride layer 20 of FIG. 2. During the known mode of programming, hotelectrons are injected into the nitride layer 20, as described above.Since the nitride 20 is a nonconductor, the trapped charge remainslocalized to the region near the drain 34 (FIG. 4A) or 16 (FIG. 4B). Theregion of trapped charge is indicated by the cross hatched area 66 inFIG. 4A and by the cross hatched area 68 in FIG. 4B. Thus, the thresholdvoltage rises, for example, to approximately 4 V, only in the portion ofthe channel under the trapped charge. The threshold voltage of theremainder of the channel under the gate remains at, for example,approximately 1 V.

One disadvantage of the above described method of programming is thatenergetic electrons are injected into the drain instead of beinginjected into the gate oxide.

One way of reducing the number of electrons injected into the drainduring programming according to the present invention is to generate avertical electric field E_(vertical) so as to complement the lateralelectric field E_(lateral) during programming. Using a vertical electricfield to accelerate electrons into the gate oxide presents the problemof how to insure that electrons at the bottom of the depletion layer areaccelerated so as to be injected into the gate oxide. One way ofaccomplishing this is by forward biasing the source/substrate junctionin a well known manner so that electrons are injected into the channelvia a lateral electric field E_(lateral). The injected electrons thendiffuse toward the drain where they encounter a vertical electric field,E_(vertical), as shown in FIG. 6 that has a sufficient strength to causethe electrons to be injected into the gate oxide. In this method, thegate preferably has a voltage of 10 V applied thereto and the drain hasa voltage of 5V applied therto while the source is grounded.

A second solution to the problem is to first apply a negative bias tothe drain so that electrons are injected into the channel from the drainvia a lateral electric field E_(lateral). Next, the drain is pulsedpositively where the pulses have an amplitude of approximately 5V so asto create a vertical electric field E_(vertical) having a sufficientstrength to sweep the injected electrons into the gate oxide.

In order to read the flash EEPROM memory cell 10 (FIG. 4B) in thereverse direction, i.e., the direction opposite that of programming, viaany of the modes of programming discussed previously, voltages areapplied to the source 14 and the gate 24 and the drain 16 is grounded.Similar to the prior art memory device of FIG. 4A, the memory device ofFIG. 4B is programmed in the forward direction by injecting hotelectrons into region 68 of the nitride layer 20. Since nitride 20 is anonconductor, the trapped charge remains localized to the region nearthe drain, for the right bit, for example. The left bit is similarexcept that source and drain functionality are reversed. The region oftrapped charge is indicated by the cross hatched area 68 in FIG. 4B.Thus, the threshold voltage rises, for example, to approximately 4V onlyin the portion of the channel under the trapped charge 68. The thresholdvoltage of the remainder of the channel remains at, for example,approximately 1 V.

To read the fight bit of the device of FIG. 4B in the reverse direction,a voltage is applied to the source 14 and the gate 24, for example 2Vand 3V, respectively, and the drain 16 is grounded. A major differencebetween reading in the forward direction and reading in the reversedirection is that when reading in the reverse direction, the gatevoltage required to put the channel of the memory device into inversionincreases significantly. For the same applied gate voltage of 3V, forexample, there will be no inversion but rather the channel of the memorydevice will be in depletion. The reason for this is that the channelregion next to the drain 16 (which functions as the source in read) isnot inverted due to the electron charge in region 68 of the nitride 20.The channel adjacent the source 14 (which functions as the drain inread) is not inverted because 2V is applied to the source [14 and thechannel, to be inverted, must be inverted relative to 2 V. In the caseof reading in the reverse direction, in order to sustain a highervoltage in the channel, a much wider depletion region must be sustained.A wider depletion region translates to more fixed charge that must becompensated for before there can be inversion. When reading in thereverse direction, to achieve a voltage drop across the charge trappingregion 66 of the prior art memory device shown in FIG. 4A similar to thevoltage drop achieved when reading the same device in the forwarddirection, a higher gate voltage is required, for example, 4 V. A muchhigher gate voltage is required to pin the voltage in the channel to ahigher voltage, i.e., the 2V that is applied to the source terminalrather than ground. In other words, the memory cell of FIG. 4B take,;advantage of the fact that for the same magnitude potential across thedrain and the source, the voltage across the portion of the channelunder the trapped charge region 68 (Figure 4B) is significantly reducedwhen reading occurs in a reverse direction to writing (programming)directly resulting in less punch through and greater impact of theprogramming charge injected in region 68 of the nitride layer 20 (FIG.4B) on the threshold voltage of the transistor.

By reading in the reverse direction, the amount of charge required to bestored on the nitride to achieve the same increase in threshold voltagein a programmed cell read in the forward direction is reduced in somecases by a factor of two or three. Accordingly, the internal electricfields generated by the charge in the nitride when the memory cell is tobe read in the reverse direction are much less than the internalelectric fields associated with the charge stored on the nitride whenthe memory cell is to be read in the forward direction. Consequentlyelectron hopping is exponentially reduced and the small amount of chargestored in the nitride does not disperse laterally through the nitridedue to the internally self generated electric fields even duringretention bake. Consequently, the memory cell of FIG. 2 does not sufferthe degradation in performance and reliability of prior art ONO memorycells like those of FIG. 1 which are programmed and read in the samedirection.

In each of the modes of programming the two bit cell of FIG. 4B asdescribed above, each bit, i.e., the left and right bit, is treated asif the device was a single bit device. For the right bit, for example,programming voltages are applied to the gate 24 and drain 16 and hotelectrons are injected into and trapped in the charge trapping layer 20in the region near the drain defined by the dashed circle 23.Correspondingly, the threshold voltage of the portion of the channeltinder the trapped charge increases as more and more electrons areinjected in the nitride layer. The programming of the right bit isrepresented in FIG. 2 by the right-pointing arrow labeled ‘PROGRAM.’This arrow represents the flow of electrons to the right duringprogramming of the right bit.

Similarly, the left bit is programmed by applying programming voltagesto the gate 24 and source 14, which now functions as the drain for theleft bit. Hot electrons are injected into and trapped in the chargetrapping layer 20 in the region defined by the dashed circle 21. Thethreshold voltage of the portion of the channel under the trapped chargecomprising the left bit increases as more and more electrons areinjected into the nitride layer. The programming of the left bit isrepresented in FIG. 2 by the left-pointing arrow labeled ‘PROGRAM.’ Thisarrow represents the flow of electrons to the left during any of theabove described modes of programming of the left bit.

The threshold voltage for a programmed left bit will be relatively lowcompared to the threshold voltage for the right bit and thus the stateof the right bit can be read without interference from the left bit.During any of the above described modes of programming of the right bit,the unprogrammed left bit remains unprogrammed.

During each of the modes of programming described above, the right bitdoes not affect the unprogrammed left bit. During a second pass orphase, the left bit is programmed and the right bit remains programmedand can still be read. The gate voltage during programming issufficiently high (typically around 10V) that the programmed right bitdoes not interfere with the programming of the left bit except toincrease somewhat the time required to reach a given threshold voltagerelative to the time required to reach the same threshold voltage forthe right bit when the right bit is programmed. In addition, the rightbit can be programmed through during programming of the left bit.Further, the programming of the left bit does not disturb the programmedright bit. This is possible because program through (i.e. theprogramming of the one bit substantially without interference from theother bit when the other bit is programmed) and read through (i.e. thereading of one bit without interference from the other bit when theother bit is programmed) occurs through both the left and the rightbits.

Program through and read through are possible due to the relatively lowgate voltages required to turn on each programmed bit when read in theforward direction as occurs when the other bit is read in the reversedirection. Another way to look at this is that a narrow charge trappingregion permits punch through to be more effective. Thus the small amountof charge 68 trapped on the right edge of charge trapping layer 20 (FIG.5) and self-aligned with the junction between region 16 and thesubstrate 12 and a comparable amount of charge 70 trapped on the leftedge of charge trapping layer 20 and self-aligned with the junctionbetween region 14 and the substrate 12 cause a narrow charge trappingregion to be formed at both the right side and the left side of chargetrapping layer 20 which is easy to be punched through when the bit isread in the forward direction. Thus when left bit 70 (the chargetrapping region 70 is referred to as a bit because the presence orabsence of charge in region 70 would represent either a zero or a one)is read in the forward direction, bit 68 is being read in the reversedirection. The punch-through under charge trap region 70 is quite easilyachieved with a low gate voltage thereby allowing the charge trapped inbit 68 to control the state of the signal read out of the device. Thusfor equal amounts of charge trapped in regions 70 and 68, reading a bitin the reverse direction results in the opposite bit having no effect onthe state of the signal being read. Another reason that the bit notbeing programmed is not disturbed is that the programming voltage is notbeing applied to the drain for the bit previously programmed. Whenprogramming the other bit, the programming voltage is applied to thedrain for the bit on the other side of the device.

As discussed earlier, the duration of each of the above describedprogramming modes must be limited for each bit in order the other bitcan still be read. For example, in the case when the right bit isprogrammed, i.e., a logic ‘0’, and the left bit is not programmed, i.e.,a logic ‘1’, if the right bit was programmed for too long a time thenwhen the left bit is read, there may be insufficient current for thesense amps to detect a logic ‘1’ because the channel is not sufficientlyconductive. In other words, if the right bit is programmed too long, aleft logic ‘1’ bit becomes slower, i.e., takes longer to read due tolower channel current,-or, in the worst case, may appear to be a logic‘0’ because the over-programmed right bit prevents the left bit frombeing read. Thus, a window exists in the programming time within which alogic ‘0’ bit must fall. One of the variable parameters is the voltagethat is applied to the functional drain region during read. As the drainvoltage is increased, a longer programming time, i.e., longer area oftrapped charge, is required in order to avoid punch through. Thus, alonger trapping region is equivalent to increasing the programming time.The upper limit of the programming time for the window is theprogramming time such that a forward read does not change the readcurrent by more than a predetermined percentage compared to the readcurrent for a reverse read. Preferably, the percentage change to theread current should be limited to 10%. This percentage, although notarbitrary, can be optimized according to the design goals of the chipdesigner. For example, a designer may wish to have three orders ofmagnitude margin between the threshold voltage of a forward read and thethreshold for a reverse read. To achieve this, the gate voltage, drainvoltage and implant level are all adjusted accordingly to determine amaximum programming time.

The effect of programming one of the bits is that both programming andreading for the second bit is slowed somewhat. The second bit can beprogrammed as long as the gate voltage during programming is higher thanthe threshold voltage of the channel with the first bit programmed andsufficient voltage is placed on the drain. The channel resistance,however, is raised due to the programming of the first bit. As long asprogramming parameters are tuned properly, the higher channel resistancedoes not prevent the second bit from being programmed and read. Thehigher channel resistance, however, does cause programming and readingof the second bit to take longer.

Reading the two bit cell of FIG. 5, as in programming, each bit istreated as if the device was a single bit device. The area of trappingfor the right bit is reference 68 and that of the left bit is referenced70. Also shown in FIG. 5 are two arrows labeled ‘READ’, one pointed inthe left direction indicating the direction for reading of the right bitand one pointed in the right direction indicating the direction forreading of the left bit.

The right bit is read in the reverse direction by applying read voltagesto the source 14 and the gate 24 and grounding the drain 16. Forexample, a gate voltage of 3V and a source voltage of 2V is applied. Theresulting voltage in the channel V_(x) will be something less than twovolts. Similarly, to read the left bit in the reverse direction, readvoltages are applied to the gate 234 and to the drain 16 and the source14 is grounded, e.g., 3V on the gate and 2V on the drain.

Should the drain voltage V_(D) is made too low and the first bit isprogrammed, insufficient voltage exists in the channel for read throughto occur. In addition, the second bit to be programmed, in this case theleft bit, experiences slower programming due to the increased seriesresistance of the channel. Even if the second bit is unprogrammed, whenthe drain voltage is too low and the first bit is programmed, the secondbit cannot be read properly. Insufficient voltage exists in order forpunch through to occur. If punch through does not occur, the second bitlooks as if it is programmed whether it really is or not.

Punch through is very sensitive to the length of the trapped chargeregion, such as regions 68 and 70 of the structure shown in FIG. 5.Should these regions be too wide or not self-aligned with theappropriate region 16 or 14 (depending on whether the charge representsthe right bit 68 or the left bit 70), then punch through would not beable to be guaranteed to occur and this concept would not work. Thus,the self-alignment of the trapped charge to the junction between region16 and the substrate (for the trapped charge 68) and region 14 and thesubstrate (for the trapped charge region 70) is crucial to thefunctioning of this invention.

A read of the two bit memory device of the present invention falls intoone of three cases: (1) neither of the two bits are programmed (2) oneof the bits is programmed and the other is not or (3) both of the bitsare programmed. The first case does not require a read through. Thesecond case requires reading through the programmed bit to read theunprogrammed bit. In this case the margin is the delta between reading asingle bit in the forward direction versus the reverse direction.

The third case requires read through to read both programmed bits.Programming the second bit, in fact, improves the conditions for readingthe first bit. This is so because the voltage in the channel is furtherreduced over the case of reading a single bit. This increases the readmargins between programmed and unprogrammed bits.

It is important to note that although the EEPROM cell of FIG. 5 storestwo bits, support circuitry and concepts designed to work with singlebit memory cells can still be used. For example, the sense amplifiercircuitry needed for the two bit memory cell is basically no differentthan that for the single bit memory cell. In the single bit memory cell,the sense amplifier circuitry is required to distinguish between twostates, the programmed and unprogrammed states. Likewise, in the two bitmemory cell of FIG. 5, the sense amplifiers must also distinguishbetween only two states: programmed and unprogrammed. Accuratelydetecting multiple current levels in a memory device is a complex anddifficult task to accomplish. The memory cell of FIG. 5, requires thatthe sense amplifiers only distinguish between two states as in thesingle bit memory cell. In the case when one of the bits isunprogrammed, i.e., no charge injected into charge trapping layer forthat bit, a read of the other bit will be unaffected by thisunprogrammed bit. On the other hand, however, in the case when one bitis programmed, a read of the other bit will be affected by this otherprogrammed bit to some extent. Depending on various process parameters,the programmed bit may cause the channel to be less conductive. However,as long as the channel is sufficiently conductive both bits can still beprogrammed and read correctly. With reference to FIG. 5, the two bitmemory device of the present invention utilizes a punch through or readthrough technique to read one bit when the other bit is in a programmedstate. In order to read, for example, the right bit 68, the read currentmust be able to read through or punch through the left bit 70, assumingthat both the left bit and the right bit have been programmed. Thus,there is a limit on the length of the charge trapping region that can beprogrammed. The charge trapping region must be short enough to permitpunch through of the bit not being read. If a bit is in the unprogrammedstate, there is no constraint on the read current of the other bit fromthe unprogrammed bit.

It is important to note that when a semiconductor device is scaled, thechannel lengths become shorter and short channel effects take hold.Thus, in the two bit memory cell, because each bit is stored indifferent areas of the transistor, short channel effects may becomeprevalent sooner than in the case of the single bit transistor. In orderto retain the usable range of drain voltage, the two bit transistor mayneed to be scaled by a smaller factor.

A key concept associated with the two bit EEPROM memory cell of FIG. 5is that for the device to operate properly, both bits must be able to bewritten and read. If one of the bits is programmed, a reverse read onthe programmed bit must sense a high V_(T), i.e., a ‘0’ and a reverseread on the unprogrammed bit must sense a low V_(T), i.e., a ‘1’. Thus,a reverse read on the unprogrammed bit, which is equivalent to a forwardread on the programmed bit, must punch through the region of trappedcharge in order to generate a high enough read current. If this does nothappen, the unprogrammed bit will not be able to be read as a ‘1’, i.e.,a conductive bit.

In order to achieve this goal, a sufficient margin is generated betweenreading in the forward and reverse directions. In order to store twobits, there must be sufficient difference between forward read of one ofthe bits and reverse read of the other bit. In addition, the reverseread current for one of the bits when the other bit is and is notprogrammed should be sufficient to distinguish between the two bits. Forexample, for a gate voltage of 3V, punch through for reading in thereverse direction occurs at approximately 1V. Thus, a drain voltage of1.6V creates a suitable safety margin ensuring that the second bit canbe read when the first bit is programmed.

There are two parameters that can be used to ensure punch through of thecharge trapping region. The first is the V_(G), applied during readingand the second is the width of the charge trapping region. A low V_(G)used during reading combined with a narrow charge trapping region makesa punch through more effective. The lower gate voltage produces a weakervertical electric field that causes the lateral electric field to bestronger.

It is more important to use a low V_(G) during reading in the two bitmemory cell than in the single bit memory cell. In the single bit case,it only had to be ensured that the reverse read was better than theforward read, meaning that the V_(T) of a given bit during forwardreading was lower than the V_(T) of this bit during reverse reading. Inthe two bit case, however, it is not enough that the VT drops in theforward case, it must drop sufficiently to be able to punch through whenreading the other bit. If the delta V_(T) between the forward andreverse read is not sufficient, one bit cannot be read when the otherbit is programmed.

The mechanism used to erase the two bit flash EEPROM memory cell of FIG.5 involves the movement of electrons as opposed to the movement ofholes. For the right bit, an erase is performed by removing electronsfrom the charge trapping nitride region 68 either through the gate 24via the top oxide 22 or through the drain 16 via the bottom oxide 18.For the left bit, an erase is performed by removing electrons from thecharge trapping nitride region 70 either through the gate 24 via the topoxide 22 or through the source 14 via the bottom oxide 18.

Using the right bit as an example, one technique of erasing is tosimultaneously apply a positive voltage potential to the gate 24 andzero potential, i.e., ground, to the drain 16 such that electrontunneling occurs from the charge trapping nitride layer 20 through thetop oxide 22 to the gate 24. The right bit is erased in a similarfashion with zero potential applied to the source 14. In this case, thetop oxide 22 is suitably constructed (again with a thickness of aboutseventy (70) Angstroms) to optimize the tunneling of electrons from thenitride charge trapping layer 20 into the gate 24 in order to facilitatethe erasing of the memory cell 10. In one embodiment, the top oxide 22has a thickness of 50 Angstroms to 80 Angstroms for a voltage on gate 24of 10 to 18 volts.

Even when the device is programmed to the same threshold voltage, thetime to complete the reverse erase is much less than the time tocomplete the forward erase. The forward erase (i.e. the time to removethe trapped charge associated with a given threshold voltage when thedevice is read in the forward direction) is slower than the reverseerase (i.e., the time to remove the trapped charge associated with agiven threshold voltage when the device is read in the forwarddirection). In addition, there is residual charge left in the chargetrapping region. This is due to the larger wider charge trapping regionformed during the forward programming that was required to generate athreshold voltage of 4V. The forward erase is approximately an order ofmagnitude slower than the reverse erase. For the same amount of chargetrapping, the equivalent threshold voltage for reverse reading is muchhigher than that for forward reading. Reading in the reverse directionrequires trapped charge so much smaller than does reading in the forwarddirection that the erase of the trapped charge is approximately 10 to 20times faster. Also the cell does not enter deep depletion. This is ahuge advantage of the memory cell of FIG. 5 over prior art memory cellsespecially floating gate cells where over-erase can cause a failure ofthe memory array due to deep depletion of the charge on the floatinggate.

The erase mechanism in the memory cell is self limiting due to the factthat as the memory cell is erased, more and more positive charge isstored in the trapping region 68 (FIG. 5) (for the right bit) of thenitride layer thereby neutralizing the negative charge stored therewhile the remainder of the nitride layer 20 remains unaffected. Thus,the threshold voltage of the channel keeps dropping until it levels offat the threshold voltage of an unprogrammed memory cell that is thethreshold voltage of the larger majority of the channel closer to thesource. Over-erasing the memory cell of the present invention onlyaffects (i.e., lowers) the threshold voltage of the portion of thechannel under the charge trapping region 68 which is a relatively narrowregion while leaving the threshold voltage of the remainder of thechannel at its normal value.

As explained previously, a result of reading in the reverse direction isthat a narrower charge trapping region is required due to the higherefficiency of the reverse read. Since erasing is always performedthrough the effective drain region 16 (for trapped charge 68 and region14 for trapped charge 70), less charge needs to be moved off the chargetrapping layer 20 and directed through the drain 16 (charge 68) oreffective drain 14 (charge 70). Thus, reading the memory cell 10 in thereverse direction enables much faster erase times. This makes the entireerase process much easier than in prior art memory devices.

Reading the memory device of FIG. 5 in the reverse direction does notjust enable simpler and faster erasing, but in fact, if the device is tobe read in the forward direction and the trapped charge is so adjustedto give the desired threshold voltage V_(T), erasing is likely to be notpossible at all. This is because much more charge must be trapped on thedielectric 20 beneath the gate 24 to achieve a usable difference inthreshold voltage V_(T) between the programmed and the unprogrammedstate when reading in the forward direction than when reading in thereverse direction. This makes erasing the memory device at bestdifficult if not impossible thus making the forward programming/forwardread impractical for this type of memory device that must be erasable.

In terms of optimization, three parameters can be varied to give thequickest programming time and the widest margins. The first parameter isthe channel length. A longer channel length, for a given programmingtime when reading in the reverse direction, increases the distancebetween the drain and the trapped charge (effectively, the source anddrain designations are flipped). This lowers the level of the lateralelectric field even lower.

The second parameter is the gate voltage that can be set to minimize thevoltage drop in the channel across the channel region beneath thetrapped charge. This further reduces the lateral electric field in thechannel beneath tile trapped charge. Within limits, the voltage in thechannel can be ‘dialed in’ by varying the voltage on the gate. Thisallows control over the voltage drop in the channel beneath the regionof trapped charge. If the gate voltage is made too low then reading alogic ‘1’, i.e., the unprogrammed state, becomes problematic. The gatevoltage for reading a logic ‘1’ must be still high enough to generateinversion in order to produce sufficient read current for each senseamplifier. Thus, a lower limit for the gate voltage is approximately 1Vabove the threshold voltage. The lower limit for the gate voltage isdetermined by the maximum time required to sense the channel currentthat represents one state of the memory cell. For example, for fastaccess time, the maximum time would be in the range of 10 to 30nanoseconds while for a mass storage device the maximum access timecould be as high as 1 microsecond. The actual gate voltage to achievethese maximum times would depend upon the device structure, thedielectric thickness, the bit line capacitance, the doping concentrationin the channel and other parameters associated with the device. An upperlimit on the gate voltage is the voltage at which the voltage in thechannel just beneath the edge of the region of trapped charge is justbelow the voltage potential applied to the source terminal duringreading in the reverse direction. A too high gate voltage will causeinversion in the channel and the benefits of the present invention arelost. Thus, it is not recommended to apply a gate voltage that generatessuch a high voltage in the channel beneath the edge of the chargetrapping region because it defeats the benefits of having a lowerpotential across the portion of the channel beneath this charge trappingregion with the accompanying reduction in leakage current and shortenedprogramming time. The gate voltage used for reading is approximately 3Vthat represents an optimized tradeoff between programming time andleak(age current.

The third optimization method, previously described and which is knownin the art, is to vary the boron doping of the channel region under thegate. An increase in the doping concentration results in a higherthreshold voltage V_(T) and a lower voltage generated in the channel.This is due to the reduction in the width of the depletion regionformed. Thus a higher doping concentration permits a higher gate voltageto be applied for the same voltage across the portion of the channelbeneath the charge trapping region.

In addition, an increase in the N_(A) doping concentration for the samelength trapping region will improve the punch through behavior of thedevice. By varying the level of boron implanted in the channel region,the width of the depletion region under the gate can be varied. Anincrease in the doping concentration results in a reduction in the widthof the depletion region for the same applied gate voltage. The reductionin the width of the depletion region occurs because there is now morefixed charge in the substrate. Thus, varying the doping concentrationcan be used to limit the length of the pinchoff region under the gate.In addition, the doping concentration can be used to increase ordecrease the initial threshold voltage of the device.

Optimization parameters specific to programming and reading two bits inthe memory cell of the present invention will now be described. Theoptimizations for programming include utilizing a longer minimumeffective channel length Leer in order to physically separate the twobits better. In addition, the implant level can be reduced in thechannel in order to increase the delta between forward and reverseprogramming. On the other hand, the implant level can be increased inthe channel in order to reduce the impact of the first bit on theprogramming of the second bit. Thus, the implant level in the channel isa compromise between the forward and reverse delta on the one hand andthe programming speed on the other hand.

The optimizations for reading include lowering the gate voltage in orderto enhance the punch through during reading. As described previously,punch through is necessary to program and read the second bit. A lowerimplant level in the channel serves to increase punch through. Also, ahigher drain voltage during read functions to increase punch through.These three optimizations relate to reading in the forward direction,which is equivalent to reading the second bit in the reverse.

In addition, a lower gate voltage reduces the number of elections thatneed to be injected into the charge trapping region. This improveserasing because it eliminates residual charge remaining trapped aftererasure. Any residual charge that remains in the charge trapping layerafter erasure degrades cycling.

The foregoing description is provided to illustrate the invention, andis not to be construed as a limitation. Numerous additions,substitutions and other changes can be made to the invention withoutdeparting from its scope as set forth in the appended claims.

We claim:
 1. A method of programming a memory cell with a substrate thatcomprises a first region and a second region with a channel therebetweenand a gate above said channel, and a charge trapping region thatcontains a first amount of charge, the method comprising: applying alateral electric field within said channel that generates a depletionlayer that has electrons at a bottom portion of said depletion layer;applying a negative bias to a drain region, said negative bias having asufficient strength so that electrons are injected into said channelfrom said second region; and applying a vertical electrical field withinsaid channel that has a sufficient strength so that said electrons atsaid bottom portion of said depletion layer are injected into saidcharge trapping region.
 2. The method of claim 1, wherein said secondregion is forward biased so that electrons are injected into thechannel.
 3. The method of claim 2, wherein said injected electronsdiffuse toward said first region drain.
 4. The method of claim 1,comprising pulsing said drain region positively so as to create saidvertical electric field that sweeps said injected electrons into saidcharge retaining region.
 5. The method of claim 1, wherein said memorycell comprises an EEPROM memory cell.
 6. The method of claim 1, whereinsaid memory cell comprises a two bit memory cell.
 7. The method of claim5, wherein said memory cell comprises a two bit memory cell.
 8. Themethod of claim 1, wherein said memory cell comprises: a P-typesubstrate; and a dielectric layer that lies between said channel andsaid charge trapping region.
 9. The method of claim 8, wherein saidmemory cell further comprises an electrical isolation layer locatedabove said channel.
 10. The method of claim 8, wherein said dielectriclayer comprises silicon dioxide.
 11. The method of claim 8, wherein saidcharge trapping layer comprises silicon nitride.